Lam Analysis Corp. this week launched Dextro, its first collaborative robotic arm designed to optimize crucial upkeep duties on semiconductor wafer fabrication gear. The Fremont, Calif.-based firm introduced that a number of superior wafer fabs all over the world have deployed Dextro.
As fabs proceed to develop in measurement, geographic range, and gear complexity, chipmakers must optimize the effectiveness of their human engineers by growing automation, famous Lam Analysis. That is turning into much more vital because the variety of semiconductor positions worldwide continues to outpace the supply of expert engineers.
Precision is essential in device upkeep, the place the correct reassembly of subsystems interprets to the underside line, the firm mentioned. Reaching first-time proper (FTR) saves time and price, it asserted. Repeatable upkeep also can cut back waste related to consumable components, labor and manufacturing downtime, resulting in much less variability and better yield in manufacturing.
“When manufacturing gear requires upkeep, the work should be finished rapidly and effectively to keep away from prolonged device downtime and wasted value,” mentioned Younger Ju Kim, vice chairman and head of the Reminiscence Etch Know-how Crew at Samsung Electronics. “Error-free upkeep by Dextro helps drive enhancements in manufacturing variability and yield. That is an thrilling milestone in Samsung’s journey to the autonomous fab.”
Lam Analysis helps semiconductor accuracy
Almost each superior chip right now is constructed with Lam know-how, claimed the corporate. It mentioned it designed Dextro to reduce device downtime and manufacturing variability.
Inside a fab, accuracy issues. Semiconductor manufacturing operates with nanoscale accuracy, and whereas Dextro doesn’t have that degree of accuracy, Lam Analysis mentioned its activity is to take care of the instruments to constantly produce at nanoscale. The result’s vital FTR outcomes that may improve yield.
Lam mentioned it designed Dextro to handle tons of of course of instruments, every requiring common, advanced upkeep. These crucial duties require repeatability with sub-micron precision. There isn’t any financial use case for a devoted cobot at every course of device. As a substitute, the new system could be repositioned across the fab as the method instruments are taken offline for upkeep.
“Dextro is a cell cart that’s guided and docked to a chunk of apparatus, then operated remotely by a fab engineer or technician,” defined Russel Dover, normal supervisor of the Buyer Assist Enterprise Group at Lam Analysis. “The cart accommodates the cobot’s management techniques and accommodates a lot of the core know-how.”
When requested concerning the typical upkeep cycle, Dover replied, “The size of time varies relying on the applying. A single software may take as much as half-hour together with docking and undocking time. Performed manually, it will possibly sometimes take two to 4 instances longer. A single Dextro unit can service as much as 100 Lam Flex chambers at a upkeep frequency of 1 time per 30 days.”
UR5e cobot on the heart of Dextro
On the coronary heart of Dextro is aUR5e cobot arm from Common Robots. The UR5e has a attain of 850 mm (33.5 in.) and a payload of 5 kg (11 lb.). Outfitted with a fast change end-of-arm wrist, Dextro can rapidly choose the suitable finish effector for the precise upkeep ask, reminiscent of:
- It exactly installs and compresses consumable parts with greater than two instances the accuracy of guide software. Exact meeting helps management etch efficiency on the wafer edge, bettering yield.
- Dextro tightens vacuum-sealing, high-precision bolts to precise specs, relieving fab engineers of a repetitive activity with as much as a 5% error fee when finished manually. Precisely assembly specs eradicate chamber temperature deviations that will take a device out of manufacturing and affect die yield, mentioned Lam Analysis.
- Utilizing automation and cleansing know-how, Dextro removes side-wall polymer build-up throughout the chamber, with out the burden of disassembly of the decrease chamber. Importantly, it does this at decrease danger to people who require heavy protecting respiratory gear to carry out the duty manually.
Automation guarantees to cut back downtime
“With the large improve in demand that AI is bringing to the semiconductor market, it’s crucial for chipmakers to maintain all their manufacturing gear working as effectively as doable to reduce downtime,” famous Bob O’Donnell, president of TECHnalysis Analysis. “Dextro can automate tedious, time-consuming, and infrequently intricate cleansing and upkeep duties on chip fabrication gear in order that manufacturing output could be maximized. It provides an enormous profit for firms that select to deploy it.”
“Dextro is an thrilling leap ahead in semiconductor manufacturing gear upkeep” mentioned Chris Carter, group vice chairman of the Buyer Assist Enterprise Group at Lam Analysis.
“Constructed to work aspect by aspect with fab engineers, it executes advanced upkeep duties with precision and repeatability which can be past human functionality alone, enabling larger device uptime and manufacturing yield,” he defined. “It’s a highly effective addition to Lam’s intensive portfolio of instruments and providers designed to assist chipmakers optimize their fabs for value and productiveness.”
Lam’s Flex G and H collection dielectric etch instruments are supported by Dextro, which is able to develop to extra instruments in 2025 and past.
Dextro joins a portfolio of Lam techniques meant to reinforce effectivity and cut back the price of operations for semiconductor fabs. It consists of the Lam Tools Intelligence course of instruments with autonomous calibration and self-adapting upkeep capabilities.
The portfolio additionally consists of Lam’s Tools Intelligence Companies, which use knowledge, machine studying, synthetic intelligence, and Lam area information to realize higher productiveness outcomes.
Dextro cobot in a semiconductor fab workcell. Supply: Lam Analysis
